Nanotechnology, Precision machining, Ion beam processing - Miyamoto's Laboratory

We are studying on Nanotechnology, especially on ion beam processing of mechanical and optical parts such as diamond tools, WC-Co mold, EUVL mirror, laser-mirror and, son on. Main themes are listed below:

(1) Ion beam machining of diamond tools and diamond molds

(2) Ion beam figuring of substrates for EUVL mirror

(3) Nano-imprint for making mirrors with ultra-smooth surface and ultra-precise shape

> Miyamoto's Laboratory Website

Keywords

Nanotechnology, Ion beam processing, Diamond, EUVL mirror, Diamond tools, Nano-imprint, Ultra-precision mold

[ Page Top ]